Korea University Reports Findings in Atomic Layer Deposition (Sustained Area-Selectivity in Atomic Layer Deposition of Ir Films: Utilization of Dual Effects of O3 in Deposition and Etching)

Media coverage

• Title	Korea University Reports Findings in Atomic Layer Deposition (Sustained Area-Selectivity in Atomic Layer Deposition of Ir Films: Utilization of Dual Effects of O3 in Deposition and Etching)
  Media name/outlet	South Korea Daily Report
  Country/Territory	United States
  Date	12/08/24
  Persons	Han Young Kim